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Saturday, April 25, 2020 | History

2 edition of Lithographic and micromachining techniques for optical component fabrication found in the catalog.

Lithographic and micromachining techniques for optical component fabrication

Lithographic and micromachining techniques for optical component fabrication

29-30 July 2001, San Diego, USA

by

  • 37 Want to read
  • 5 Currently reading

Published by SPIE in Bellingham, Wash., USA .
Written in English

    Subjects:
  • Optical instruments -- Design and construction -- Congresses.,
  • Lenses -- Design and construction -- Congresses.,
  • Micromachining -- Congresses.,
  • Microlithography -- Congresses.

  • Edition Notes

    Includes bibliographical references and index.

    StatementErnst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
    GenreCongresses.
    SeriesSPIE proceedings series ;, v. 4440, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 4440.
    ContributionsKley, Ernst-Bernhard., Herzig, Hans Peter., Society of Photo-optical Instrumentation Engineers.
    Classifications
    LC ClassificationsTS510 .L577 2001
    The Physical Object
    Paginationx, 324 p. :
    Number of Pages324
    ID Numbers
    Open LibraryOL3581018M
    ISBN 100819441546
    LC Control Number2002277171
    OCLC/WorldCa48546510

    Photolithography, also called optical lithography or UV lithography, is a process used in microfabrication to pattern parts on a thin film or the bulk of a substrate (also called a wafer).It uses light to transfer a geometric pattern from a photomask (also called an optical . Photolithography, also called optical lithography or UV lithography, is a process used in microfabrication to pattern parts of a thin film or the bulk of a substrate (also called a wafer).


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Lithographic and micromachining techniques for optical component fabrication Download PDF EPUB FB2

MEMS Lithography and Micromachining Techniques. Abstract. Photolithography is a patterning process that uses light to transfer a pattern from a mask to a photosensitive polymer Cited by: 1.

Lithographic and Micromachining Techniques for Optical Component Fabrication II Kley, Ernst-Bernhard; Herzig, Hans Peter; Abstract. Publication: Lithographic and Micromachining Techniques for Optical Component Fabrication Cited by: 1. It's more of a "theoretical lithography" book in the sense that various ideas that are expressed in words in other lithography books are mapped to their underlying mathematical optical, physical, and chemical models in this book.

Because of this, this book is a prerequisite for doing computational by: Lithographic and micromachining techniques for optical component fabrication: JulySan Diego, USA Author: Ernst-Bernhard Kley ; Hans Peter Herzig ; Society of Photo-optical Instrumentation Engineers.

adshelp[at] The ADS is operated by the Smithsonian Astrophysical Observatory under NASA Cooperative Agreement NNX16AC86ACited by: 1. Get this from a library. Lithographic and micromachining techniques for optical component fabrication II: August,San Diego, California, USA. [Ernst-Bernhard Kley; Hans Peter Herzig; Society of Photo-optical.

MEMS Lithography and Micromachining Techniques. Photolithography is a patterning process that uses light to transfer a pattern from a mask to a photosensitive polymer layer. The resulting pattern. To that end, we have been researching diverse soft lithographic techniques for guided wave device fabrication.

Soft lithography is a micro-fabrication technique that has been shown to generate high quality micro and nanostructures as small as 10 nm. It eliminates the use of costly and time-consuming lithographic techniques Cited by: 4. The optical components used in X-ray microscopy and extreme ultraviolet lithography (EUVL) demand surface roughness of about nm rms, a figure accuracy about 1 nm peak-to-valley (p–v).

Laser micromachining techniques have the advantages to be very flexible and to be easily integrated in a process to propose integrated solutions for manufacturing. Microfluidic devices are more and more complex and so is the integration of other elements (optical.

Lithographic Simulation: A Review Chris A. Mack KLA-Tencor FINLE Division SuiteN Capital ofTexas Highway, Austin, TX Optical lithography modeling began in the early s when Rick Dill started an effort at IBM Lithographic and Micromachining Techniques for Optical Component Fabrication.

Lithography equipment used in micromachining can produce MEMS components for use in accelerometers and inkjet printers, pressure sensors, and optical switches.

Lithography equipment. Low-cost micro fabrication technique is indispensable for mass production of micro optical elements. Si very large-scale integration (VLSI) fabrication technology such as electron beam lithography or advanced photo lithography is generally applied to fabricate micro structures, however the production cost is too expensive for mass production of optical Cited by: 2.

Micromachining is related to specific techniques applied to micro and meso scale elements, in order to produce components with high precision and very restrictive dimensional and geometrical.

A review of the current state of the art in optical and electron beam lithography simulation is presented. Basic physical models are described and examples are given.

In addition, rigorous electromagnetic simulation for mask topography is shown and the use of statistical modeling to predict feature size distributions in manufacturing Cited by: 3 November Process development and application of grayscale lithography for efficient three-dimensionally profiled fiber-to-waveguide couplers.

Lithographic and Micromachining Techniques for Optical Component Fabrication II; () Lithographic and Micromachining Techniques for Optical Component Fabrication Cited by: 3.

9 November Precision cutting processes for manufacturing of optical components. Manfred Weck; Jan Hennig Manfred Weck, Jan Hennig, and Robert Hilbing "Precision cutting processes for manufacturing of optical components", Proc. SPIELithographic and Micromachining Techniques for Optical Component Fabrication Cited by: The fabrication of optical nanostructures requires high resolution lithography on large areas.

Especially for applications in which the components fulfill a critical task of the optical system like e.g. pulse compression gratings in an ultra-fast laser or a WGP in the illumination set-up of a lithography Cited by: Lithographic and Micromachining Techniques for Optical Component Fabrication November Proceedings of SPIE - The International Society for Optical Engineering Ernst-Bernhard Kley.

The digital grayscale maskless lithography technique is a promising technique for fabrication 3D micro-structures and has been developed in resent years [13], [14]. The technique combines the advantages of a programmable digital micromirror device Cited by: Fabrication techniques combining holographic and scanning electron beam lithography with ion beam micromachining have produced planar phase gratings with intervals as small as A, guiding.

Plasma jet assisted chemical etching is under development with respect to efficient machining techniques for precision asphere fabrication. The paper gives an overview of precision engineering techniques for optical surface processing focusing on the status of ion beam and plasma by: The lithographic fabrication techniques facilitate the rational design of the structural platform for the mechano-responsive smart window.

For example, Kim et al. demonstrated a simple strategy to Cited by: 3. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography.

ELSEVIER Applied Surface Science () applied surface science Fabrication of optical components by laser lithography Th. Dresel *, J. Schwider Lehrstuhl fiir Optik, Physikalisches Institut der Unit ersit~it Erlangen, Staudtstr.

7/B2, Erlangen, Germany Received 17 September ; accepted 25 November Abstract For the fabrication of special optical components Cited by: 3. Direct ablation using UV lasers is particularly attractive for micromachining polymers, and is increasingly used in manufacturing microfluidic bulk substrates.

Direct laser machining can produce microfluidic chips in their entirety or correspond to a step in a chain of hybrid fabrication. Chris's Favorite Review Papers on Lithography. The papers listed below are available in PDF format by clicking on the titles.

Chris A. Mack, “Trends in Optical Lithography,” Optics and Photonics News (April, ) pp. Chris A. Mack, “Lithographic simulation: a review,” Lithographic and Micromachining Techniques for Optical Component Fabrication.

Zeitner, U.D.; Dannberg, P. Double-Sided Hybrid Microoptical Elements Combining Functions of Multistage Optical Systems. In Proceedings of SPIELithographic and Micromachining Techniques for Optical Component Fabrication Cited by: Dr. Chris A. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years.

He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until In he received the SEMI Award for North America for his efforts in lithography 5/5(6). The importance of complex optical components increases permanently. In the past most applications could be solved by spherical optics.

Spherical optics can be manufactured by conventional and established grinding and polishing processes. In the last years aspherical and microstructured optical components became more and more important. These components Cited by: Chris A. Mack, “Resolution and Depth of Focus in Optical Lithography”, Microlithographic Techniques in IC Fabrication, Proc., SPIE Vol.

() pp. Chris A. Mack, “ Electron Beam Lithography. NEEDS FOR MICROMACHINING There is a growing demand for industrial products with increased number of functions and of reduced dimensions.

Micro-machining is the most basic technology for the production of such miniature parts and components. Micro machining File Size: 6MB. fabrication methodologies based on binary, grayscale, and interferometric techniques additional techniques, such as additive lithography, and lift-off processes for sub-micron patterning.

ULTRAFAST LASER MICROMACHINING. surface and bulk micromachining for micro- and nano-optics fabrication of 2D and 3D waveguides fabrication of novel optical. Introducing Optical Lithography Lithography creates a resist image on the wafer. The subsequent etching, lift off, or ion implantation process is masked by the resist image at the areas dictated by the lithography File Size: KB.

Micromachining Technology for Micro-Optics and Nano-Optics. Editor(s): Replication of micro-optical components by UV-molding process Author(s): New fabrication of highly dense electromagnetic. Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller.

Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication. Explaining principles underlying the main micromachining practices currently being used and developed in industrial countries around the world, Micromachining of Engineering Materials outlines advances in material removal that have led to micromachining 5/5(1).

Micromachining was performed in polymethylmethacrylate (PMMA) using X-ray lithography for the fabrication of miniaturized devices (microchips) for potential applications in chemical and genetic analyses. The devices were fabricated using two different techniques Cited by: fabrication techniques were given, including prototyping (hot embossing, inject molding, and soft lithography) and direct fabrication (laser micromachining, photolithography, lithography, and x-ray lithography) techniques.

This is followed by an in-depth look at detection techniques: optical Cited by: Alternatively, soft lithography permits microstructuring without the need for illumination but the limited choice of inks limits the possibilities of the method.

On the other hand, direct serial micromachining is a widely studied subject. Excimer laser micromachining Cited by:. Rapid fabrication of optical elements has been demonstrated using laser micromachining.

Potomac Photonics, Inc., Lanham, Maryland, is a manufacturer of ultraviolet excimer lasers and precision laser micromachining .We are also able to obtain hybrid so-gel glass formation under the electron radiation, so that material can be used as a negative resist in electron-beam lithography.

Both of these techniques are promising for the fabrication of submicron optical components and micromachining .Micro- and nanofabrication techniques have revolutionized the pharmaceutical and medical fields as they offer the possibility for highly reproducible mass-fabrication of systems with complex geometries and functionalities, including novel drug delivery systems and bionsensors.

a combination of bulk and surface micromachining Cited by: